SEM6200 Series
Product description:
◇ Affordable
◇ English interface, with one key imaging function
◇ Automatic adjustment function: electron gun heating, bias, alignment, focus, brightness, contrast, dissipate degree, astigmatism and other memories
◇ Llow maintenance and repair costs
Project | SEM6200 | SEM6000Z |
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Resolution | 4.5nm (30KV) |
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15x~250,000x |
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Type electron gun | Hair Fork tungsten cathode |
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Acceleration voltage | 0~30KV |
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Lens system | Three electromagnetic lens |
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Lens aperture | Three diaphragm can be selected to adjust the vacuum outside |
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Sample stage | Manual | X / Y automatic station |
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Stroke | X | 0~50mm(big sample stage 0-80mm) |
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Y | 0~50mm |
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Z | 0~25mm(big sample stage 0-30mm) |
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R | 360° |
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T | -5°~90°(big sample stage 0°-90°) |
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Detector | Secondary electron detector element, backscattered electron detector (optional), X-ray energy dispersive spectroscopy (optional) |
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Vacuum system | Molecular pump (diffusible molecular pump) |